High Resolution and Fast Response of Humidity Sensor Based on AlN Cantilever With Two Groups of Segmented Electrodes

Resonant cantilever based on piezoelectric materials is one of the most promising platforms for real-time humidity sensing. In this letter, we propose a sensor an AlN microcantilever with high-order resonant mode and sensing layer MoS 2 . The top electrode designed into two groups segmented electrodes in order to achieve high intensity resonance peak resonator operated at mode. Compared standard same dimension, sensitivity newly proposed increased from 5.99 778 Hz/%RH when about 80%RH. resolution 0.21%RH 0.025%RH because improvement ratio noise, which cannot be achieved simply by increasing frequency. shows low hysteresis (5.8%) wide range 10%RH 90%RH. Moreover, has good short-term repeatability, fast response (0.6 s) recovery (8 changes, indicating its great potential fast-response detection.